Analysis of BAW responses in ZnO multi-layer structures using transmission line method

With the advent of epitaxial semiconductor growth technology, piezoelectric multilayer materials became available for broad application. Piezoelectric ZnO has large electromechanical coupling coefficients making it a promising candidate for multilayer thin film resonant filter devices. A family of methodologies has been developed to explain the analogous behavior of such multi-layer structures in terms of solutions to the acoustic wave differential equation. In the work encompassed by this paper, the model using transmission line representations to simulate the resonant behaviors in BAW devices is demonstrated. The model shows the electrical admittance response as a function of frequency.