Effect of high-temperature annealing on the structural and optical properties of ZnO films

被引：41

作者：

Wang, L ^{[1
]}

Pu, Y ^{[1
]}

Fang, WQ ^{[1
]}

Dai, JN ^{[1
]}

Zheng, CD ^{[1
]}

Mo, CL ^{[1
]}

Xiong, CB ^{[1
]}

Jiang, FY ^{[1
]}

机构：

[1] Nanchang Univ, Educ Minist, Engn Res Ctr Luminescence Mat & Devices, Nanchang 330047, Peoples R China

来源：

THIN SOLID FILMS | 2005年 / 491卷 / 1-2期

关键词：

zinc oxide; annealing; optical properties; X-ray diffraction;

D O I：

10.1016/j.tsf.2005.05.048

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The annealing effect on the optical properties of ZnO epilayers was reported. The ZnO thin films were grown using metal organic chemical vapor deposition method, and annealed in atmosphere at 850 degrees C for different time periods. Double-crystal X-ray diffraction showed that, after annealing, the density of the edge-dislocations decreased dramatically upon annealing, however, the screw-dislocations were not affected significantly. Strong green photoluminescence was observed in the annealed ZnO films while the as-grown films showed only near band edge emission. The deterioration of the optical properties in the annealed film, however, only occurred near the film surface in a very thin layer. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：323 / 327

页数：5

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