On the angular dependence of focused laser ablation by nanosecond pulses in solgel and polymer materials

被引：9

作者：

George, DS ^{[1
]}

Onischenko, A ^{[1
]}

Holmes, AS ^{[1
]}

机构：

[1] Univ London Imperial Coll Sci Technol & Med, Dept Elect & Elect Engn, Opt & Semicond Devices Grp, London SW7 2BT, England

来源：

APPLIED PHYSICS LETTERS | 2004年 / 84卷 / 10期

关键词：

D O I：

10.1063/1.1655702

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Focused laser ablation by single laser pulses at varying angles of incidence is studied in two materials of interest: a solgel (Ormocer 4) and a polymer (SU8). For a range of angles (up to 70degrees from normal), and for low-energy (<20 muJ), 40 ns pulses at 266 nm wavelength, the ablation depth along the direction of the incident laser beam is found to be independent of the angle of incidence. This allows the crater profiles at oblique incidence to be generated directly from the crater profiles at normal incidence by a simple coordinate transformation. This result is of use in the development of simulation tools for direct-write laser ablation. A simple model based on the moving ablation front approach is shown to be consistent with the observed behavior. (C) 2004 American Institute of Physics.

引用

页码：1680 / 1682

页数：3

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