Deformable micro-mirror for adaptive optics composed of piezoelectric PZT thin films

被引：0
作者：
Kotera, H [1 ]
Kanno, I [1 ]
Inoue, T [1 ]
Suzuki, T [1 ]
机构：
[1] Kyoto Univ, Kyoto 6068501, Japan
来源：
IEEE/LEOS Optical MEMs 2005: International Conference on Optical MEMs and Their Applications | 2005年
关键词：
D O I：
10.1109/OMEMS.2005.1540061
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we present the piezoelectric-driven deformable micro-mirror for optical wavefront correction. The mirror membrane was fabricated on diaphragm structure composed of piezoelectric PZT thin films on Si substrate. The application of voltage induced large deflection of the surface of the diaphragm.
引用
收藏
页码：31 / 32
页数：2
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