This article presents a novel route to prepare hollow silica microspheres with well-defined wall thickness by using cross-linked polystyrene (PS) microspheres as templates with the assistance of supercritical carbon dioxide (SC-CO(2)). In this approach, the cross-linked PS templates can be firstly prepared via emulsifier-free polymerization method by using ethylene glycol dimethacrylate or divinylbenzene as cross-linkers. Then, the silica shell from the sol-gel process of tetraethyl orthosilicate (TEOS) which was penetrated into the PS template with the assistance of SC-CO(2) was obtained. Finally, the hollow silica spheres were generated after calcinations at 600 A degrees C for 4 h. The shell thickness of the hollow silica spheres could be finely tuned not only by adjusting the TEOS/PS ratio, which is the most frequently used method, but also by changing the pressure and aging time of the SC-CO(2) treatment. Fourier transform infrared spectroscopy, transmission electron microscopy, and scanning electron microscope were used to characterize these hollow silica spheres.