Chemically directed self-assembly of perpendicularly aligned cylinders by a liquid crystalline block copolymer

被引：0
作者：
Yamashita, N. [1 ]
Watanabe, S. [2 ]
Nagai, K. [1 ]
Komura, M. [1 ]
Iyoda, T. [1 ,2 ]
Aida, K. [3 ]
Tada, Y. [3 ]
Yoshida, H. [3 ]
机构：
[1] Tokyo Inst Technol, Div Integrated Mol Engn, Chem Resources Lab, Yokohama, Kanagawa 2268503, Japan
[2] Japan Sci & Technol Agcy JST, ERATO, Iyoda Supra Integrated Mat Project iSIM, Chiyoda Ku, Tokyo 453, Japan
[3] Hitachi Ltd, Hitachi Res Lab, Hitachi, Ibaraki 3191292, Japan
来源：
JOURNAL OF MATERIALS CHEMISTRY C | 2015年 / 3卷 / 12期
基金：
日本学术振兴会;
关键词：
AG-NANOPARTICLE ARRAY; DIBLOCK COPOLYMERS; DENSITY MULTIPLICATION; TEMPLATE; NANOSTRUCTURES; GRAPHOEPITAXY; LITHOGRAPHY; GRAPHENE; FILMS;
D O I：
10.1039/c4tc02851a
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Chemical epitaxy with a density multiplication process was applied to the perpendicularly oriented hexagonal cylinder nanostructure of liquid crystalline block copolymer (PEO-b-PMA(Az)) thin film through thermally induced microphase separation by using a newly designed PMA(Az)(24) brush. The hexagonal lattice orientation with 1.9 tera-cylinders per inch(2) was laterally controlled for long-range-ordered direct self-assembly. Furthermore, the direct pattern-transfer of the assembled structure to an Au nanodot array was demonstrated by doping of HAuCl4 selectively into the PEO cylindrical microdomains and then vacuum ultraviolet light irradiation to cause polymer etching and reduction of the Au ions.
引用
收藏
页码：2837 / 2847
页数：11
相关论文
共 51 条
  • [1] A morphological study of well-defined smectic side-chain LC block copolymers
    Anthamatten, M
    Zheng, WY
    Hammond, PT
    [J]. MACROMOLECULES, 1999, 32 (15) : 4838 - 4848
  • [2] Free-energy model of asymmetry in side-chain liquid-crystalline diblock copolymers
    Anthamatten, M
    Hammond, PT
    [J]. JOURNAL OF POLYMER SCIENCE PART B-POLYMER PHYSICS, 2001, 39 (21) : 2671 - 2691
  • [3] Normally Oriented Cylindrical Nanostructures in Amphiphilic PEO-LC Diblock Copolymers Films
    Asaoka, Sadayuki
    Uekusa, Takayuki
    Tokimori, Hitomi
    Komura, Motonori
    Iyoda, Tomokazu
    Yamada, Takeshi
    Yoshida, Hirohisa
    [J]. MACROMOLECULES, 2011, 44 (19) : 7645 - 7658
  • [4] Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication
    Black, CT
    Guarini, KW
    Milkove, KR
    Baker, SM
    Russell, TP
    Tuominen, MT
    [J]. APPLIED PHYSICS LETTERS, 2001, 79 (03) : 409 - 411
  • [5] Highly ordered arrays of mesoporous silica nanorods with tunable aspect ratios from block copolymer thin films
    Chen, Aihua
    Komura, Motonori
    Kamata, Kaori
    Iyoda, Tomokazu
    [J]. ADVANCED MATERIALS, 2008, 20 (04) : 763 - +
  • [6] Ordering cylindrical microdomains for binary blends of block copolymers with graphoepitaxy
    Chen, Feng
    Akasaka, Satoshi
    Inoue, Tornohiro
    Takenaka, Mikihito
    Hasegawa, Hirokazu
    Yoshida, Hiroshi
    [J]. MACROMOLECULAR RAPID COMMUNICATIONS, 2007, 28 (22) : 2137 - 2144
  • [7] Delgadillo P. A. R., P SPIE, V8680
  • [8] Long-range order and orientation of cylinder-forming block copolymers on chemically nanopatterned striped surfaces
    Edwards, Erik W.
    Stoykovich, Mark P.
    Solak, Harun H.
    Nealey, Paul F.
    [J]. MACROMOLECULES, 2006, 39 (10) : 3598 - 3607
  • [9] Ultrahigh density electrolytic nanoreactors composed of liquid crystalline block copolymer template: water-electrolysis-induced deposition of cerium oxyhydroxide nanorod array
    Goda, Takenori
    Iyoda, Tomokazu
    [J]. JOURNAL OF MATERIALS CHEMISTRY, 2012, 22 (19) : 9477 - 9480
  • [10] Solvent-Assisted Directed Self-Assembly of Spherical Microdomain Block Copolymers to High Areal Density Arrays
    Gu, Weiyin
    Xu, Ji
    Kim, Jung-Keun
    Hong, Sung Woo
    Wei, Xinyu
    Yang, Xiaomin
    Lee, Kim Y.
    Kuo, David S.
    Xiao, Shuaigang
    Russell, Thomas P.
    [J]. ADVANCED MATERIALS, 2013, 25 (27) : 3677 - 3682
123456