Micropatterning of sulfonated polyaniline using a soft lithography based lift-off process

被引:7
作者
Ferrell, Nicholas [1 ]
Yang, Yanyin [1 ]
Hansford, Derek J. [1 ]
机构
[1] Ohio State Univ, Dept Biomed Engn, Columbus, OH 43210 USA
来源
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2010年 / 16卷 / 11期
关键词
POLYMER INTEGRATED-CIRCUITS; CONDUCTING POLYMERS; DRUG-DELIVERY; FABRICATION; MICROSTRUCTURES; POLY(DIMETHYLSILOXANE); TRANSISTORS; DEVICES; FILMS;
D O I
10.1007/s00542-010-1118-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A combination of soft lithography and lift-off processing is presented for the fabrication of sulfonated polyaniline (SPAN) microstructures. A soft lithography based micromolding process was used to pattern sacrificial layers using a thermoplastic polymer. SPAN was then polymerized in situ to coat the patterned substrate. The sacrificial layer was removed by lift-off in an organic solvent, leaving the patterned SPAN on the substrate. This process was performed on several rigid and flexible substrates including glass, silicon, and polyimide. The film thickness and roughness were measured as a function of reaction time using atomic force microscopy. Patterns were also imaged using scanning electron microscopy. This process provides a cost effective and versatile method of patterning SPAN and has potential applications in a number of conducting polymer devices.
引用
收藏
页码:1951 / 1956
页数:6
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