Fabrication and analysis of a magnetic self-power microgenerator

被引：34

作者：

Pan, C. T. ^{[1
]}

Hwang, Y. M. ^{[1
]}

Hu, H. L. ^{[1
]}

Liu, H. C. ^{[2
]}

机构：

[1] Natl Sun Yat Sen Univ, Dept Mech & Electromech Engn, Ctr Nanosci & Nanotechnol, Kaohsiung 804, Taiwan

[2] Natl Cheng Kung Univ, MIRL Ind Technol Res Inst, Ctr Micro Nano Technol Res, Tainan 70101, Taiwan

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2006年 / 304卷 / 01期

关键词：

Microgenerator; Planar coil; Permanent magnet; Energy product;

D O I：

10.1016/j.jmmm.2006.01.202

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper presents a magnetic self-power microgenerator with induction planar Cu coil, microspring membrane and a permanent magnet of FePt. A vibratory magnet is fabricated using sputtering process. The induced voltage is simulated using ANSYS software. The size of this microgenerator is as small as 0.45 cm(3) in volume. A maximum energy product (BH)(max) of 40 kJ/m(3) can be achieved after post-annealing process. At exciting 60 Hz frequencies, maximum power 100 mu W and voltage 40 mV are induced experimentally. The experimental and simulated results are discussed and compared. (C) 2006 Elsevier B. V. All rights reserved.

引用

页码：E394 / E396

页数：3

共 6 条

[1] Self-powered signal processing using vibration-based power generation [J].