Fiber-coupled displacement interferometry without periodic nonlinearity

被引：34

作者：

Ellis, Jonathan D. ^{[1
,2
,3
]}

Meskers, Arjan J. H. ^{[1
]}

Spronck, Jo W. ^{[1
]}

Schmidt, Robert H. Munnig ^{[1
]}

机构：

[1] Delft Univ Technol, PME Mech Syst Design, NL-2628 CD Delft, Netherlands

[2] Univ Rochester, Dept Mech Engn, Rochester, NY 14627 USA

[3] Univ Rochester, Inst Opt, Rochester, NY 14627 USA

来源：

OPTICS LETTERS | 2011年 / 36卷 / 18期

关键词：

HETERODYNE LASER INTERFEROMETER; HIGH-RESOLUTION; UNCERTAINTY; ACCURACY; ERRORS; STAGE;

D O I：

10.1364/OL.36.003584

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Displacement interferometry is widely used for accurately characterizing nanometer and subnanometer displacements in many applications. In many modern systems, fiber delivery is desired to limit optical alignment and remove heat sources from the system, but fiber delivery can exacerbate common interferometric measurement problems, such as periodic nonlinearity, and account for fiber-induced drift. In this Letter, we describe a novel, general Joo-type interferometer that inherently has an optical reference after any fiber delivery that eliminates fiber-induced drift. This interferometer demonstrated no detectable periodic nonlinearity in both free-space and fiber-delivered variants. (C) 2011 Optical Society of America

引用

页码：3584 / 3586

页数：3

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