Grinding free electric-field poling of Ti indiffused z-cut LiNbO3 wafer with submicron resolution

被引：4

作者：

Janner, D. ^{[1
]}

Tulli, D. ^{[1
]}

Lucchi, F. ^{[3
]}

Vergani, P. ^{[3
]}

Giurgola, S. ^{[3
]}

Pruneri, V. ^{[1
,2
]}

机构：

[1] ICFO Inst Ciencias Foton, Barcelona 08860, Spain

[2] ICREA Inst Catalana Recerca & Estudis Avancats, Barcelona 08010, Spain

[3] Avanex Corp Sede Secondaria, San Donato Milanese, MI, Italy

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2008年 / 91卷 / 02期

关键词：

D O I：

10.1007/s00339-008-4405-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Electric-field domain inversion cannot be performed in z-cut LiNbO3 after waveguide fabrication using common Ti-indiffusion techniques. In this work we show that an appropriate combination of low indiffusion temperature, dry O-2 and Li enriched atmosphere during waveguide fabrication allows subsequent domain inversion without the need for any surface grinding, which would dramatically increase the risk of LiNbO3 substrate breakage during its processing. The proposed technique allows a simplified, robust and high yield processing over full wafer scale (up to 4 '') with sub-micron resolution.

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收藏

页码：319 / 321

页数：3

相关论文

共 12 条

[1] Blue light generation in a periodically poled Ti:LiNbO3 channel waveguide [J].

Amin, J ;

Pruneri, V ;

Webjorn, J ;

Russell, PS ;

Hanna, DC ;

Wilkinson, JS .

OPTICS COMMUNICATIONS, 1997, 135 (1-3) :41-44

[2] 1ST ORDER QUASIPHASE MATCHING IN LINBO3 [J].

ARMANI, F ;

DELACOURT, D ;

LALLIER, E ;

PAPUCHON, M ;

HE, Q ;

DEMICHELI, M ;

OSTROWSKY, DB .

ELECTRONICS LETTERS, 1992, 28 (02) :139-140

[3] Modeling and optimization of low chirp LiNbO3 Mach-Zehnder modulators with an inverted ferroelectric domain section [J].

Courjal, N ;

Porte, H ;

Hauden, J ;

Mollier, P ;

Grossard, N .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 2004, 22 (05) :1338-1343

[4]

LUCCHI F, OFC 07

[5] QUASI-PHASE-MATCHED OPTICAL PARAMETRIC OSCILLATORS IN BULK PERIODICALLY POLED LINBO3 [J].

MYERS, LE ;

ECKARDT, RC ;

FEJER, MM ;

BYER, RL ;

BOSENBERG, WR ;

PIERCE, JW .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1995, 12 (11) :2102-2116

[6] FERROELECTRIC DOMAIN INVERSION CAUSED IN LINBO3 PLATES BY HEAT-TREATMENT [J].

NAKAMURA, K ;

ANDO, H ;

SHIMIZU, H .

APPLIED PHYSICS LETTERS, 1987, 50 (20) :1413-1414

[7] Zero-chirp broadband Z-cut TiLiNbO3 optical modulator using polarization reversal and branch electrode [J].

Oikawa, S ;

Yamamoto, F ;

Ichikawa, J ;

Kurimura, S ;

Kitamura, J .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 2005, 23 (09) :2756-2760

[8] 49 MW OF CW BLUE-LIGHT GENERATED BY FIRST-ORDER QUASI-PHASE-MATCHED FREQUENCY-DOUBLING OF A DIODE-PUMPED 946-NM ND-YAG LASER [J].

PRUNERI, V ;

KOCH, R ;

KAZANSKY, PG ;

CLARKSON, WA ;

RUSSELL, PSJ ;

HANNA, DC .

OPTICS LETTERS, 1995, 20 (23) :2375-2377

[9] Efficient cascaded difference frequency conversion in periodically poled Ti:LiNbO3 waveguides using pulsed and cw pumping [J].

Schreiber, G ;

Suche, H ;

Lee, YL ;

Grundkötter, W ;

Quiring, V ;

Ricken, R ;

Sohler, W .

APPLIED PHYSICS B-LASERS AND OPTICS, 2001, 73 (5-6) :501-504

[10] DOMAIN INVERSION EFFECTS IN TI-LINBO3 INTEGRATED OPTICAL-DEVICES [J].

THANIYAVARN, S ;

FINDAKLY, T ;

BOOHER, D ;

MOEN, J .

APPLIED PHYSICS LETTERS, 1985, 46 (10) :933-935