A metal-insulator-metal electron emitter based on a porous Al2O3 film

被引：3
|
作者：
Xue, Tao [1 ]
Liang, Zhi-Hu [1 ]
Zhang, Xiao-Ning [1 ]
Liu, Chun-Liang [1 ]
机构：
[1] Xi An Jiao Tong Univ, Minist Educ, Key Lab Phys Elect & Devices, Xian 710049, Peoples R China
来源：
APPLIED PHYSICS LETTERS | 2015年 / 106卷 / 16期
基金：
中国国家自然科学基金;
关键词：
MIM CATHODES; EMISSION CURRENT; THIN-FILMS; ELECTROLUMINESCENCE; EFFICIENCY; DEVICES; BEAM;
D O I：
10.1063/1.4919107
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A metal-insulator-metal electron emitter containing a sandwiched insulator layer composed of porous aluminum oxide Al2O3 was fabricated. The electron emission characteristics of the electron emitter were investigated under vacuum and xenon. Treatment with H3PO4 and rapid thermal oxidation increased the electric field inside the insulator and improved the quality of porous Al2O3, resulting in higher efficiency and less fluctuation of electron emission. The maximum current and efficiency of electron emission reached 1.05 mA/cm(2) and 51.2%, respectively, under a pressure of 1. 0 x 10(-4) Pa. In addition, electrons were injected into xenon and 147 nm vacuum ultraviolet emission was detected in xenon at a pressure of 5.0 x 10(2)Pa. This electron emitter has a great potential for use as an ultraviolet radiation source. (C) 2015 AIP Publishing LLC.
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页数：4
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