共 50 条
- [11] Diblock copolymer directed self-assembly for CMOS device fabrication DESIGN AND PROCESS INTEGRATION FOR MICROELECTRONIC MANUFACTURING IV, 2006, 6156
- [12] Diblock copolymer directed self-assembly for CMOS device fabrication EMERGING LITHOGRAPHIC TECHNOLOGIES XII, PTS 1 AND 2, 2008, 6921
- [13] Exploration of the directed self-assembly based nano-fabrication design space using computational simulations ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES V, 2013, 8680
- [17] Fabrication of novel biomaterials through molecular self-assembly Nature Biotechnology, 2003, 21 : 1171 - 1178
- [20] Fabrication of Nanodevices Through Block Copolymer Self-Assembly FRONTIERS IN NANOTECHNOLOGY, 2022, 4