Nanoimprint Lithography on curved surfaces prepared by fused deposition modelling

被引:20
作者
Koepplmayr, Thomas [1 ]
Haeusler, Lukas [1 ]
Bergmair, Iris [1 ]
Muehlberger, Michael [1 ]
机构
[1] Profactor GmbH, Funct Surfaces & Nanostruct, Stadtgut A2, A-4407 Steyr Gleink, Austria
来源
SURFACE TOPOGRAPHY-METROLOGY AND PROPERTIES | 2015年 / 3卷 / 02期
关键词
fused deposition modelling (FDM); soft UV-nanoimprint lithography (soft UV-NIL); curved surface; flexible stamp; IMPRINT LITHOGRAPHY; SUBMICRON PATTERNS; SOFT MOLD; UV-NIL; FABRICATION; MICROSTRUCTURES; REPLICATION; RESOLUTION; SUBSTRATE; PRESSURE;
D O I
10.1088/2051-672X/3/2/024003
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Fused deposition modelling (FDM) is an additive manufacturing technology commonly used for modelling, prototyping and production applications. The achievable surface roughness is one of its most limiting aspects. It is however of great interest to create well-defined (nanosized) patterns on the surface for functional applications such as optical effects, electronics or bio-medical devices. We used UV-curable polymers of different viscosities and flexible stamps made of poly(dimethylsiloxane) (PDMS) to perform Nanoimprint Lithography (NIL) on FDM-printed curved parts. Substrates with different roughness and curvature were prepared using a commercially available 3D printer. The nanoimprint results were characterized by optical light microscopy, profilometry and atomic force microscopy (AFM). Our experiments show promising results in creating well-defined microstructures on the 3D-printed parts.
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页数:11
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