共 41 条
[1]
High resolution lithography with PDMS molds
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2004, 22 (06)
:3229-3232
[2]
Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2005, 23 (06)
:2944-2949
[3]
Direct imprinting using soft mold and gas pressure for large area and curved surfaces
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2005, 23 (06)
:1687-1690
[4]
Fabrication of concave gratings by curved surface UV-nanoimprint lithography
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2008, 26 (05)
:1690-1695
[5]
Soft mold and gasbag pressure mechanism for patterning submicron patterns onto a large concave substrate
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2006, 24 (04)
:1724-1727
[8]
IMPRINT OF SUB-25 NM VIAS AND TRENCHES IN POLYMERS
[J].
APPLIED PHYSICS LETTERS,
1995, 67 (21)
:3114-3116