Planar superconducting resonators with internal quality factors above one million

被引：382

作者：

Megrant, A. ^{[1
,2
]}

Neill, C. ^{[1
]}

Barends, R. ^{[1
]}

Chiaro, B. ^{[1
]}

Chen, Yu ^{[1
]}

Feigl, L. ^{[2
]}

Kelly, J. ^{[1
]}

Lucero, Erik ^{[1
]}

Mariantoni, Matteo ^{[1
,3
]}

O'Malley, P. J. J. ^{[1
]}

Sank, D. ^{[1
]}

Vainsencher, A. ^{[1
]}

Wenner, J. ^{[1
]}

White, T. C. ^{[1
]}

Yin, Y. ^{[1
]}

Zhao, J. ^{[1
]}

Palmstrom, C. J. ^{[2
,4
]}

Martinis, John M. ^{[1
,3
]}

Cleland, A. N. ^{[1
,3
]}

机构：

[1] Univ Calif Santa Barbara, Dept Phys, Santa Barbara, CA 93106 USA

[2] Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USA

[3] Univ Calif Santa Barbara, Calif NanoSyst Inst, Santa Barbara, CA 93106 USA

[4] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA

来源：

APPLIED PHYSICS LETTERS | 2012年 / 100卷 / 11期

关键词：

SURFACE;

D O I：

10.1063/1.3693409

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We describe the fabrication and measurement of microwave coplanar waveguide resonators with internal quality factors above 10(7) at high microwave powers and over 10(6) at low powers, with the best low power results approaching 2 x 10(6), corresponding to similar to 1 photon in the resonator. These quality factors are achieved by controllably producing very smooth and clean interfaces between the resonators' aluminum metallization and the underlying single crystal sapphire substrate. Additionally, we describe a method for analyzing the resonator microwave response, with which we can directly determine the internal quality factor and frequency of a resonator embedded in an imperfect measurement circuit. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3693409]

引用

页数：4

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