Microshape Measurement Method Using Speckle Interferometry Based on Phase Analysis

被引：7

作者：

Arai, Yasuhiko ^{[1
]}

机构：

[1] Kansai Univ, Fac Engn Sci, Dept Mech Engn, Yamate Cho 3-3-35, Suita, Osaka, Japan

来源：

PHOTONICS | 2021年 / 8卷 / 04期

关键词：

measurement beyond the diffraction limit; measurement mechanism; non-periodical fine structure measurement; speckle interferometry; detecting phase distribution;

D O I：

10.3390/photonics8040112

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A method for the measurement of the shape of a fine structure beyond the diffraction limit based on speckle interferometry has been reported. In this paper, the mechanism for measuring the shape of the fine structure in speckle interferometry using scattered light as the illumination light is discussed. Furthermore, by analyzing the phase distribution of the scattered light from the surface of the measured object, this method can be used to measure the shapes of periodic structures and single silica microspheres beyond the diffraction limit.

引用

页数：13

共 29 条

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