High-tech industry, as the pillar industry of the knowledge economy and major impetus of economic development, has become the focus of economic competition between the various countries. So, it is of highly theoretically and realistically importance for the promotion of innovative activities and the enhancement of the core competitiveness to not only evaluate technology innovation ability of Hi-tech industry objectively and efficiently but also master its evolution law. In this paper, the author selects 11 original indexes of 30 provinces and cities, 4 big economic regions, exercises factor analysis model, discuss the reason to difference and its countermeasure in the eastern, Midwest and northeast region on the basis of the synthetically appraisal and analysis to the difference of technology innovation ability of regional High-tech industry, and provides the basis to formulate regional development policy for various regions, especially the western region.