Chemical design challenges in polymers for microlithographic applications: The role of fluorine.

被引：0

作者：

Reichmanis, E ^{[1
]}

Nalamasu, O ^{[1
]}

机构：

[1] Bell Labs, Lucent Technol, Murray Hill, NJ 07974 USA

来源：

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2000年 / 219卷

关键词：

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

20-FLUO

引用

页码：U662 / U663

页数：2

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