Physical vapour-phase growth of pentacene crystal thin films

被引:0
|
作者
Liu, JJ [1 ]
Shi, JW [1 ]
Zhang, SM [1 ]
Wang, W [1 ]
Guo, SX [1 ]
Liu, MD [1 ]
机构
[1] Jilin Univ, Coll Elect & Engn, State Key Lab Integrated Opto Elect, Changchun 130023, Peoples R China
来源
LASERS IN MATERIAL PROCESSING AND MANUFACTURING | 2002年 / 4915卷
关键词
physical vapor deposition; crystal thin-film; pentacene;
D O I
10.1117/12.482871
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Physical vapor deposition in horizontal systems has been used to grow crystal thin-film of organic semiconductor pentacene. Using 10similar to30mg of starting material, 20similar to30mm sized crystals thin-film, suitable for characterization measurements or device fabricated, have been grown. And we have measured the sample of pentacene crystal thin-film using TEM X-ray diffraction electron microscopy. The results indicated that the crystal lattice array order.
引用
收藏
页码:289 / 294
页数:6
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