Chemical composition and microstructure of metal doped graphite-like carbon films by closed field unbalanced magnetron sputtering

被引：1

作者：

Chen, Dichun ^{[1
]}

Jiang, Bailing ^{[2
]}

Fu, Yanghong ^{[2
]}

机构：

[1] Xian Univ Techonl, Adv Anal & Test Ctr, Xian 710048, Peoples R China

[2] Xian Univ Techonl, Sch Mat Sci & Engn, Xian 710048, Peoples R China

来源：

MATERIALS SCIENCE AND ENGINEERING APPLICATIONS, PTS 1-3 | 2011年 / 160-162卷

关键词：

magnetron sputtering; metal doped GLC films; XPS; HRTEM; C/CR PVD COATINGS; TRIBOLOGICAL PERFORMANCE; DLC COATINGS; DEPOSITION; BEHAVIOR; WEAR; XPS;

D O I：

10.4028/www.scientific.net/AMR.160-162.1845

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The addition of metal atoms within the matrix of the graphite-like carbon films lead to the improvement of their mechanical properties. In this paper, metal (Cr, Al, Zr, W) doped graphite-like carbon(GLC) films were deposited on silicon substrates by closed field unbalanced magnetron sputtering from pure metal target and pure graphite target. Chemical composition and chemical states of films were measured by X-ray photoelectron spectroscopy (XPS) and show that mainly sp(2) bond existing in all the metal doped films, and sp(2)/sp(3) ratios are not depend on the doped metal. Cross-section micrographs were observed by high resolution transmission electron microscopy (HRTEM) and revealed a structure of composite that metal or metal carbides embedded in amorphous carbon matrix. The relationship between microstructure and chemical composition was discussed.

引用

页码：1845 / +

页数：2

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