Plasma processing for surface optical modifications of PET films

被引：32

作者：

Esena, Paola ^{[1
]}

Zanini, S. ^{[1
]}

Riccardi, C. ^{[1
]}

机构：

[1] Univ Studi Milano Bicocca, Dipartimento Fis Occhialini, I-20126 Milan, Italy

来源：

VACUUM | 2007年 / 82卷 / 02期

关键词：

plasma processes; PET; optical modifications; reflectivity; deposition; etching;

D O I：

10.1016/j.vacuum.2007.07.054

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The plasma interaction with the surface produces modifications of its chemical structure or morphology. Surface modifications through cold plasma occur, thanks to the high plasma reactivity and ability to affect the surface of materials. The present work shows the surface modification of polyethylene terephthalate (PET) films after the exposure both to, low-pressure plasma (film deposition by plasma enhanced chemical vapour deposition) and to an atmospheric pressure dielectric barrier discharge (surface etching). After plasma treatment we have analysed the effect on the PET surface. For the atmospheric pressure plasma-treated samples, contact angle and atomic force microscope analysis enable us to determine roughness changes. For the low-pressure plasma samples, contact angles and Fourier transform infrared absorption spectroscopy analysis are used to estimate the chemical composition of the deposition and focused ion beam analysis to collect the image and calculate the thickness of plasma deposition. Both plasma treatments (film deposition and etching) cause changes in optical properties as indicated by reflectivity measurements. (C) 2007 Elsevier Ltd. All rights reserved.

引用

页码：232 / 235

页数：4

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