Advances in thick-film sensors

被引：0

作者：

White, N. M. ^{[1
]}

机构：

[1] Univ Southampton, Sch Elect & Comp Sci, Southampton, Hants, England

来源：

TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年

关键词：

thick-film; sensor technology; hybrid devices;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A review of the latest advances in thick-film sensors is presented. Examples are given of applications in the major signal domains. A brief history of the technology is presented and it is shown how thick-films can be combined with MicroElectroMechanical Systems (MEMS) to produce robust and cost-effective solutions to sensing problems. Some specific examples of mechanical transducers developed in the author's own laboratories are presented.

引用

页数：3

共 50 条

[21] The formulation and processing of a thick-film magnetostrictive material [J].

Grabham, NJ ;

Beeby, SP ;

White, NM .

MEASUREMENT SCIENCE AND TECHNOLOGY, 2002, 13 (01) :59-64

[22] PRECISION ETCHING OF THICK-FILM ALUMINUM CIRCUITS [J].

WIESNER, HJ .

PLATING AND SURFACE FINISHING, 1979, 66 (04) :52-56

[23] A novel thick-film ceramic humidity sensor [J].

Qu, WM ;

Meyer, JU .

SENSORS AND ACTUATORS B-CHEMICAL, 1997, 40 (2-3) :175-182

[24] Thick-film printing of PZT onto silicon [J].

Maas, R ;

Koch, M ;

Harris, NR ;

White, NM ;

Evans, AGR .

MATERIALS LETTERS, 1997, 31 (1-2) :109-112

[25] Modelling and analysis of thick-film thermoelectric microgenerators [J].

Markowski, Piotr ;

Dziedzic, Andrzej .

OPTOELECTRONIC AND ELECTRONIC SENSORS VI, 2006, 6348

[26] The influence of Rh surface doping on anomalous properties of thick-film SnO2 gas sensors [J].

Licznerski, BW ;

Nitsch, K ;

Teterycz, H ;

Wisniewski, K .

SENSORS AND ACTUATORS B-CHEMICAL, 2001, 79 (2-3) :157-162

[27] A Review of HTS Thick-Film Microwave Filter Technology [J].

S. K. Remillard ;

S. Cordone .

Journal of Superconductivity and Novel Magnetism, 2006, 19 :523-530

[28] The application of thick-film technology in C-MEMS [J].

Darko Belavic ;

Marko Hrovat ;

Janez Holc ;

Marina Santo Zarnik ;

Marija Kosec ;

Marko Pavlin .

Journal of Electroceramics, 2007, 19 :363-368

[29] Thick-film piezoelectric materials for high temperature applications [J].

Beeby, SP ;

Torah, RN ;

Grabham, N ;

Tudor, MJ ;

White, NM .

FERROELECTRICS, 2004, 313 :63-69

[30] A multilayer thick-film PZT actuator for MEMs applications [J].

Harris, N. R. ;

Hill, M. ;

Torah, R. ;

Townsend, R. ;

Beeby, S. ;

White, N. M. ;

Ding, J. .

SENSORS AND ACTUATORS A-PHYSICAL, 2006, 132 (01) :311-316

← 1 2 3 4 5 →