Advances in thick-film sensors

被引：0

作者：

White, N. M. ^{[1
]}

机构：

[1] Univ Southampton, Sch Elect & Comp Sci, Southampton, Hants, England

来源：

TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年

关键词：

thick-film; sensor technology; hybrid devices;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A review of the latest advances in thick-film sensors is presented. Examples are given of applications in the major signal domains. A brief history of the technology is presented and it is shown how thick-films can be combined with MicroElectroMechanical Systems (MEMS) to produce robust and cost-effective solutions to sensing problems. Some specific examples of mechanical transducers developed in the author's own laboratories are presented.

引用

页数：3

共 50 条

[1] Thick-film sensors
White, N
Turner, J
MEASUREMENT SCIENCE AND TECHNOLOGY, 1997, 8 (01) : U3 - U3
[2] THICK-FILM PRESSURE SENSORS
HARSANYI, G
HAHN, E
MECHATRONICS, 1993, 3 (02) : 167 - 171
[3] THICK-FILM CHEMICAL SENSORS
CHU, WF
LEONHARD, V
ERDMANN, H
ILGENSTEIN, M
SENSORS AND ACTUATORS B-CHEMICAL, 1991, 4 (3-4) : 321 - 324
[4] SENSORS IN THICK-FILM TECHNOLOGY
TSCHULENA, G
TECHNISCHES MESSEN, 1989, 56 (06): : 243 - 244
[5] NEW THICK-FILM SENSORS
LEPPAVUORI, S
ELECTROCOMPONENT SCIENCE AND TECHNOLOGY, 1980, 6 (3-4): : 193 - 197
[6] THICK-FILM PRESSURE SENSORS
STEIN, MA
HUANG, C
CHITALE, S
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1988, 196 : 17 - ANYL
[7] THICK-FILM SENSORS - AN OVERVIEW
PRUDENZIATI, M
MORTEN, B
SENSORS AND ACTUATORS, 1986, 10 (1-2): : 65 - 82
[8] Thick-film humidity sensors
Golonka, LJ
Licznerski, BW
Nitsch, K
Teterycz, H
MEASUREMENT SCIENCE AND TECHNOLOGY, 1997, 8 (01) : 92 - 98
[9] THICK-FILM TECHNOLOGY AND SENSORS
MORTEN, B
PRUDENZIATI, M
TARONI, A
SENSORS AND ACTUATORS, 1983, 4 (02): : 237 - 245
[10] THICK-FILM GAS SENSORS
MARTINELLI, G
CAROTTA, MC
SENSORS AND ACTUATORS B-CHEMICAL, 1995, 23 (2-3) : 157 - 161

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