Achromatic phase shifter with eight times magnification of rotation angle in low coherence interference microscopy

被引:4
作者
Dong, Jing-tao [1 ]
Lu, Rong-sheng [1 ]
机构
[1] Hefei Univ Technol, Sch Instrument Sci & Optoelect Engn, Hefei 230009, Anhui, Peoples R China
基金
国家高技术研究发展计划(863计划); 中国国家自然科学基金;
关键词
WHITE-LIGHT INTERFEROMETRY; QUALITY-GUIDED PHASE; UNWRAPPING ALGORITHM; GEOMETRIC PHASE; FREQUENCY-ANALYSIS; FRINGE-ORDER; PROFILOMETRY; POLARIZER;
D O I
10.1364/AO.50.001113
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
An achromatic phase shifter with a rotating half-wave plate (HWP) used at the input and output of the low coherence interference microscopy is presented. This novel achromatic phase-shifter configuration is first investigated, and then its performances are compared with those of traditional phase shifters theoretically by means of Jones matrices. It is evident that the achromatism and the variation of the amplitude ratio of the proposed achromatic phase-shifter configuration is much better than other traditional phase-shifter configurations, and it can provide a phase shift of eight times the rotation angle of the HWP, which is the largest magnification achieved by far. A low coherence interference microscopy system based on the proposed achromatic phase-shifter configuration is also established to confirm the eight times relation between phase-shift and rotation angle of the HWP experimentally. At last, the three-dimensional profile and the groove depth of a step height calibration standard are obtained by using the traditional four-step algorithm to illustrate the capability and the accuracy of the low coherence interference microscopy system based on the proposed achromatic phase-shifter configuration. (C) 2011 Optical Society of America
引用
收藏
页码:1113 / 1123
页数:11
相关论文
共 36 条
  • [1] Geometric phase observation with dispersed fringes
    Baba, N
    Shibayama, K
    [J]. OPTICAL REVIEW, 1997, 4 (05) : 593 - 595
  • [2] THE ADIABATIC PHASE AND PANCHARATNAM PHASE FOR POLARIZED-LIGHT
    BERRY, MV
    [J]. JOURNAL OF MODERN OPTICS, 1987, 34 (11) : 1401 - 1407
  • [3] Born M., 1980, Principles of Optics, V6th, P1
  • [4] CORRELATION MICROSCOPE
    CHIM, SSC
    KINO, GS
    [J]. OPTICS LETTERS, 1990, 15 (10) : 579 - 581
  • [5] *CVI MELL GRIOT IN, 2009, CVI MELL GRIOT TECHN, P58
  • [6] Determination of fringe order in white-light interference microscopy
    de Groot, P
    de Lega, XC
    Kramer, J
    Turzhitsky, M
    [J]. APPLIED OPTICS, 2002, 41 (22) : 4571 - 4578
  • [7] Geometric phase of optical rotators
    Galvez, EJ
    Holmes, CD
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1999, 16 (08): : 1981 - 1985
  • [8] Improved vertical-scanning interferometry
    Harasaki, A
    Schmit, J
    Wyant, JC
    [J]. APPLIED OPTICS, 2000, 39 (13) : 2107 - 2115
  • [9] Achromatic and apochromatic halfwave and quarterwave retarders
    Hariharan, P
    [J]. OPTICAL ENGINEERING, 1996, 35 (11) : 3335 - 3337
  • [10] WHITE-LIGHT PHASE-STEPPING INTERFEROMETRY FOR SURFACE PROFILING
    HARIHARAN, P
    ROY, M
    [J]. JOURNAL OF MODERN OPTICS, 1994, 41 (11) : 2197 - 2201