An embedded microchannel in a MEMS plate resonator for ultrasensitive mass sensing in liquid

被引：39

作者：

Agache, V. ^{[1
]}

Blanco-Gomez, G. ^{[1
]}

Baleras, F. ^{[1
]}

Caillat, P. ^{[1
]}

机构：

[1] DTBS, CEA LETI Minatec, F-38054 Grenoble, France

来源：

LAB ON A CHIP | 2011年 / 11卷 / 15期

关键词：

LIMITS;

D O I：

10.1039/c1lc20011a

中图分类号：

Q5 [生物化学];

学科分类号：

071010 ; 081704 ;

摘要：

A mass sensor innovative concept is presented here, based on a hollow plate Micro Electro Mechanical System (MEMS) resonator. This approach consists in running a solution through an embedded microchannel, while the plate resonator is actuated according to a Lame-mode by electrostatic coupling in dry environment. The experimental results have shown a clear relationship between the measured shift of the resonance frequency and the sample solution density. Additionally, depending on the channel design and the solution properties, the quality factor (Q-factor) was noticed maintaining its level and even substantial improvement in particular cases. Resonators demonstrate resonance frequencies close to 78 MHz and Q-factor of a few thousands for liquid phase detection operating at ambient temperature and atmospheric pressure. Frequency fluctuations study revealed a 13 Hz instability level, equivalent to 1.5 fg in mass. Using a fully electronic readout configuration, a mass responsivity of ca. 850 fg kHz(-1) was monitored.

引用

页码：2598 / 2603

页数：6

共 36 条

[1]

Agache V., 2009, 15th International Conference on Solid-State Sensors, Actuators and Microsystems. Transducers 2009, P1630, DOI 10.1109/SENSOR.2009.5285772

[2] STATISTICS OF ATOMIC FREQUENCY STANDARDS [J].