An embedded microchannel in a MEMS plate resonator for ultrasensitive mass sensing in liquid

被引:40
作者
Agache, V. [1 ]
Blanco-Gomez, G. [1 ]
Baleras, F. [1 ]
Caillat, P. [1 ]
机构
[1] DTBS, CEA LETI Minatec, F-38054 Grenoble, France
关键词
LIMITS;
D O I
10.1039/c1lc20011a
中图分类号
Q5 [生物化学];
学科分类号
071010 ; 081704 ;
摘要
A mass sensor innovative concept is presented here, based on a hollow plate Micro Electro Mechanical System (MEMS) resonator. This approach consists in running a solution through an embedded microchannel, while the plate resonator is actuated according to a Lame-mode by electrostatic coupling in dry environment. The experimental results have shown a clear relationship between the measured shift of the resonance frequency and the sample solution density. Additionally, depending on the channel design and the solution properties, the quality factor (Q-factor) was noticed maintaining its level and even substantial improvement in particular cases. Resonators demonstrate resonance frequencies close to 78 MHz and Q-factor of a few thousands for liquid phase detection operating at ambient temperature and atmospheric pressure. Frequency fluctuations study revealed a 13 Hz instability level, equivalent to 1.5 fg in mass. Using a fully electronic readout configuration, a mass responsivity of ca. 850 fg kHz(-1) was monitored.
引用
收藏
页码:2598 / 2603
页数:6
相关论文
共 36 条
[1]  
Agache V., 2009, 15th International Conference on Solid-State Sensors, Actuators and Microsystems. Transducers 2009, P1630, DOI 10.1109/SENSOR.2009.5285772
[2]   STATISTICS OF ATOMIC FREQUENCY STANDARDS [J].
ALLAN, DW .
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1966, 54 (02) :221-&
[3]   Ultimate and practical limits of fluid-based mass detection with suspended microchannel resonators [J].
Arlett, J. L. ;
Roukes, M. L. .
JOURNAL OF APPLIED PHYSICS, 2010, 108 (08)
[4]   Fabrication of a Nanomechanical Mass Sensor Containing a Nanofluidic Channel [J].
Barton, Robert A. ;
Ilic, B. ;
Verbridge, Scott S. ;
Cipriany, Benjamin R. ;
Parpia, Jeevak M. ;
Craighead, Harold G. .
NANO LETTERS, 2010, 10 (06) :2058-2063
[5]  
Berg H. C., 1993, Random Walks in Biology
[6]   Fully-differential poly-SiC Lame-mode resonator and checkerboard filter [J].
Bhave, SA ;
Gao, D ;
Maboudian, R ;
Howe, RT .
MEMS 2005 MIAMI: TECHNICAL DIGEST, 2005, :223-226
[7]   Micromechanical mass sensors for biomolecular detection in a physiological environment [J].
Braun, T ;
Barwich, V ;
Ghatkesar, MK ;
Bredekamp, AH ;
Gerber, C ;
Hegner, M ;
Lang, HP .
PHYSICAL REVIEW E, 2005, 72 (03)
[8]   Weighing of biomolecules, single cells and single nanoparticles in fluid [J].
Burg, Thomas P. ;
Godin, Michel ;
Knudsen, Scott M. ;
Shen, Wenjiang ;
Carlson, Greg ;
Foster, John S. ;
Babcock, Ken ;
Manalis, Scott R. .
NATURE, 2007, 446 (7139) :1066-1069
[9]   Nonmonotonic Energy Dissipation in Microfluidic Resonators [J].
Burg, Thomas P. ;
Sader, John E. ;
Manalis, Scott R. .
PHYSICAL REVIEW LETTERS, 2009, 102 (22)
[10]  
Cheng Jing., 2001, Biochip Technology