A Fiber-Optic Sensor for Simultaneous Temperature and Pressure Measurements Based on a Fabry-Perot Interferometer and a Fiber Bragg Grating

被引：12

作者：

Fadeev, K. M. ^{[1
,2
]}

Larionov, D. D. ^{[1
]}

Zhikina, L. A. ^{[1
,2
]}

Minkin, A. M. ^{[1
,2
]}

Shevtsov, D., I ^{[1
,2
]}

机构：

[1] Perm Sci Ind Instrument Making Co, Perm 614990, Russia

[2] Perm Natl Res Polytech Univ, Perm 614990, Russia

来源：

INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 2020年 / 63卷 / 04期

关键词：

Temperature measurement - Etching - Pressure measurement - Quartz - Fiber optic sensors;

D O I：

10.1134/S0020441220050024

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper presents a sensor for simultaneous pressure and temperature measurements, which is made entirely of quartz components and uses a Fabry-Perot interferometer and a fiber Bragg grating (FBG). This combination allows simultaneous temperature and pressure measurements, as well as the reduction of the contribution of temperature to the pressure measurement. The sensitive element is a quartz-glass membrane manufactured by etching. The sensitivity of the sensor to the pressure is 50 nm/bar; the sensitivity to the temperature is 4.6 nm/degrees C on the Fabry-Perot interferometer side and 10 pm/degrees C on the FBG side. It has been shown that the FBG can be used as a thermal compensating element.

引用

页码：543 / 546

页数：4

共 11 条

[1]

Dostovalov A.V., 2014, Prikl. Fotonika, V2, P48

[2] SU-8 MEMS Fabry-Perot pressure sensor [J].

Hill, G. C. ;

Melamud, R. ;

Declercq, F. E. ;

Davenport, A. A. ;

Chan, I. H. ;

Hartwell, P. G. ;

Pruitt, B. L. .

SENSORS AND ACTUATORS A-PHYSICAL, 2007, 138 (01) :52-62

[3] A diaphragm-type fiber Bragg grating pressure sensor with temperature compensation [J].

Huang, Jun ;

Zhou, Zude ;

Wen, Xiaoyan ;

Zhang, Dongsheng .

MEASUREMENT, 2013, 46 (03) :1041-1046

[4]

[Качура С.М. Kachura S.M.], 2019, [Труды ВИАМ, Trudy VIAM], P52, DOI 10.18577/2307-6046-2019-0-5-52-61

[5] Simultaneous strain and temperature measurements in composites using a multiplexed fibre Bragg grating sensor and an extrinsic Fabry-Perot sensor [J].

Liu, T ;

Fernando, GF ;

Rao, YJ ;

Jackson, DA ;

Zhang, L ;

Bennion, I .

SMART SENSING, PROCESSING, AND INSTRUMENTATION - SMART STRUCTURES AND MATERIALS 1997, 1997, 3042 :203-212

[6]

Mileshin V.A., 2019, ROSS NAUCHN TEKHN K, P115

[7]

Shishkin V.V., 2016, PRIKL FOTONIKA, V3, P61

[8]

Timoshenko S.P., 1966, PLASTINKI OBOLOCHKI, P71

[9]

Volyntsev A.B., 2014, FIZ PERMSK KRAYA, P11

[10] Ultrathin FBG pressure sensor with enhanced responsivity [J].

Zhang, W. T. ;

Li, F. ;

Liu, Y. L. ;

Liu, L. H. .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2007, 19 (17-20) :1553-1555

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