Investigation of fracture characteristics in thermally aged thin films of diamond-like carbon

被引：3

作者：

Baek, Seung ^{[1
]}

Parks, Se-June ^{[2
]}

Lee, Kwang-Real ^{[2
]}

Seok, Chang-Sung ^{[1
]}

机构：

[1] Sungkyunkwan Univ, Sch Mech Engn, Suwon 440746, Gyeonggi Do, South Korea

[2] Korea Inst Sci & Technol, Future Technol Res Div, Seoul, South Korea

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 2008年 / 483-84卷 / 1-2 C期

关键词：

DLC; aging; indentation; fracture toughness;

D O I：

10.1016/j.msea.2006.10.178

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

To investigate the chemical and mechanical stability of diamond-like carbon films at 300 degrees C, we thermally aged the films for different aging times (0: virgin, 24, 48 h). From the Raman spectra analyses, the indentation tests, and the total work fracture data, we confirmed that the aged sample-2(precursor gas: C(6)H(14)) had better mechanical characteristics and thermal stabilities than the aged sample-1(precursor gas: C(6)H(6)). Also, the fracture toughness is found to decrease with increasing ratio of the intensities of the D- and G-peaks in Raman spectroscopy. (C) 2007 Published by Elsevier B.V.

引用

页码：245 / 247

页数：3