Design and fabrication of SU-8 polymer arrayed waveguide gratings based on flexible PDMS substrates

被引：1
|
作者：
Li, Hongqiang [1 ]
Wang, Yingjie [1 ]
Sun, Yaqiang [1 ]
Zhang, Sai [1 ]
An, Zhixuan [1 ]
Zhang, Shanshan [1 ,2 ]
Zhang, Cheng [1 ]
Zhang, Zanyun [1 ]
Mao, Quanhua [1 ]
Prades Garcia, Juan Daniel [3 ]
机构：
[1] Tiangong Univ, Sch Elect & Informat Engn, Tianjin Key Lab Optoelect Detect Technol & Syst, Tianjin 300387, Peoples R China
[2] Nankai Univ, Inst Modern Opt, Tianjin Key Lab Optoelect Sensor & Sensing Networ, Tianjin 300071, Peoples R China
[3] Univ Barcelona, Dept Elect & Biomed Engn, E-08028 Barcelona, Spain
来源：
APPLIED OPTICS | 2022年 / 61卷 / 09期
基金：
中国国家自然科学基金;
关键词：
Substrates - Microchannels - Fabrication - Chemical modification - Silicones - Photoresists - Refractive index;
D O I：
10.1364/AO.447132
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We investigated and Lubricated 1 x 8 and 1 x 16 traditional/saddle arrayed waveguide grating (AWG) wavelength division multiplexing devices on flexible substrates. The core layer was made of the negative epoxy photoresist SU-8, and polydimethylsiloxane (PDMS) material was selected for the cladding based on the high refractive index difference. A chemical modification method of PDMS was proposed to enhance the film-forming characteristics of the SU-8 core layer on PDMS substrates. After fabricating and characterizing the optical properties of the AWGs, the dimensions of the proposed 1 x 8 and 1 x 16 AWGs were 0.9 x 0.8 cm(2) and 1.1 x 0.9 cm(2), respectively. Experimental results showed that the saddle-type 1 x 8 and 1 x 16 AWGs had good signal transmission characteristics, and the insertion losses were only 5.1 dB and 6.8 dB, respectively, which were lower than those of traditional-type AWGs with the same dimensions and number of waveguides. (C) 2022 Optica Publishing Group
引用
收藏
页码：2213 / 2218
页数：6
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