Clarifications of the mechanism of nano-fluctuation of aerostatic thrust bearing with surface restriction

被引：38

作者：

Yoshimura, Tomotaka ^{[2
]}

Hanafusa, Teruhisa ^{[2
]}

Kitagawa, Takakazu ^{[2
]}

Hirayama, Tomoko ^{[1
]}

Matsuoka, Takashi

Yabe, Hiroshi ^{[3
]}

机构：

[1] Doshisha Univ, Machine Elements & Tribol Lab, Dept Mech Eng, Kyoto 6100394, Japan

[2] Doshisha Univ, Grad Sch Engn, Dept Mech Eng, Kyoto 6100394, Japan

[3] Kyoto Univ, Dept Mech Eng, Sakyo Ku, Kyoto 6068501, Japan

来源：

TRIBOLOGY INTERNATIONAL | 2012年 / 48卷

关键词：

Aerostatic thrust bearing; Nano-fluctuations; Visualization experiment; Computational fluid analysis;

D O I：

10.1016/j.triboint.2011.03.030

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

Fluctuations of objects supported by aerostatic bearings are a severe problem for ultraprecise positioning technology. The cause of small fluctuations, called nano-fluctuations of objects supported by the thrust bearing was investigated. An aerostatic thrust bearing with surface restriction by T-shaped grooves was the focus of this study. A computational fluid analysis of the airflow around the bearing was conducted and compared with experimental photographs. In addition, the amount of nano-fluctuations was measured by changing the bearing clearance and inlet pressure of the bearing. The nano-fluctuation was induced by the fluctuation of atmospheric pressure due to the unsteady airflow around the bearing edge, and the amount of the fluctuation depended on the Reynolds number corresponding to the flow velocity. (C) 2011 Elsevier Ltd. All rights reserved.

引用

页码：29 / 34

页数：6

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