Novel Atmospheric Pressure Inductively Coupled Micro Plasma Source Using Floating Wire Electrode

被引：16

作者：

Kumagai, Shinya ^{[1
]}

Matsuyama, Hiroki ^{[1
]}

Yokoyama, Yoshihiro ^{[1
]}

Hori, Masaru ^{[2
]}

Sasaki, Minoru ^{[2
]}

机构：

[1] Toyota Technol Inst, Dept Adv Sci & Technol, Nagoya, Aichi 4688511, Japan

[2] Nagoya Univ, Dept Elect Engn & Comp Sci, Nagoya, Aichi 4648603, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2011年 / 50卷 / 08期

关键词：

MICROPLASMA JET; SCALE PLASMA; EMISSION-SPECTROMETRY; GAS-CHROMATOGRAPHY; DISCHARGE; ELEMENTS; CHIP;

D O I：

10.1143/JJAP.50.08JA02

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A novel atmospheric pressure inductively coupled micro-plasma (ICMP) source is proposed. The gas flow channel is prepared inside the center of the U-shaped Cu electrode of a one-turn antenna coil. The plasma region is the center linear trench designed for the optical coupling with the slit aperture of the spectrometer. A floating wire electrode is first placed inside the trench of the gas channel without the wired connection to the power source. A glass window plate covers the gas channel allowing the optical emission from the linear trench. Under He gas flow, the plasma ignites at similar to 18 W of 100 MHz very high frequency (VHF) power, and the optical emission increases with the power. Without the floating wire electrode, the plasma does not ignite even at 200 W. The floating wire electrode enhances the ignition. The characteristics of the floating wire electrode and the ICMP source are described. (C) 2011 The Japan Society of Applied Physics

引用

页数：6

共 32 条

[21]

Ohta T., 2010, DENKI GAKKAI RONBU A, V130, P972

[22] Simultaneous monitoring of multimetallic atom densities in plasma processes employing a multimicrohollow cathode lamp [J].

Ohta, Takayuki ;

Ito, Masafumi ;

Tachibana, Yoshihiro ;

Taneda, Satoshi ;

Takashima, Seigo ;

Hori, Masaru ;

Kano, Hiroyuki ;

Den, Shoji .

APPLIED PHYSICS LETTERS, 2007, 90 (25)

[23] Development of atomic emission detector for gas chromatography equipped with coaxial micro plasma torch and detection of sulfur and phosphorus organic compounds [J].

Saito, Nozomi ;

Tsunokawa, Jun ;

Nakagama, Taturo ;

Uchiyama, Katsumi .

BUNSEKI KAGAKU, 2007, 56 (09) :729-735

[24]

SASAKI M, 2010, P IEEE LEOS INT C OP, P39

[25] Living tissue under treatment of cold plasma atmospheric jet [J].

Shashurin, A. ;

Keidar, M. ;

Bronnikov, S. ;

Jurjus, R. A. ;

Stepp, M. A. .

APPLIED PHYSICS LETTERS, 2008, 93 (18)

[26]

Shigeta K., 2010, DENKI GAKKAI RONBU A, V130, P955

[27] Reactive evaporation of metal wire and microdeposition of metal oxide using atmospheric pressure reactive microplasma jet [J].

Shimizu, Yoshiki ;

Bose, Arumugam Chandra ;

Mariotti, Davide ;

Sasaki, Takeshi ;

Kirihara, Kazuhiro ;

Suzuki, Tsunehisa ;

Terashima, Kazuo ;

Koshizaki, Naoto .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (10B) :8228-8234

[28] Optical and electrical characterization of pulse-modulated argon atmospheric-pressure inductively coupled microplasma jets [J].

Tajima, Satomi ;

Matsumori, Masashi ;

Nakatsuka, Shigeki ;

Tsuchiya, Shouichi ;

Ichiki, Takanori .

JOURNAL OF APPLIED PHYSICS, 2010, 108 (08)

[29] Development of atomic radical monitoring probe and its application to spatial distribution measurements of H and O atomic radical densities in radical-based plasma processing [J].

Takahashi, Shunji ;

Takashima, Seigo ;

Yamakawa, Koji ;

Den, Shoji ;

Kano, Hiroyuki ;

Takeda, Keigo ;

Hori, Masaru .

JOURNAL OF APPLIED PHYSICS, 2009, 106 (05)

[30] Surface modification of poly(dimethylsiloxane) for controlling biological cells' adhesion using a scanning radical microjet [J].

Tan, Helen M. L. ;

Fukuda, H. ;

Akagi, T. ;

Ichiki, T. .

THIN SOLID FILMS, 2007, 515 (12) :5172-5178

← 1 2 3 4 →