Micro-impedance inclinometer with wide-angle measuring capability and no damping effect

被引：45

作者：

Lin, Che Hsin ^{[1
,2
]}

Kuo, Shu Ming ^{[1
]}

机构：

[1] Natl Sun Yat Sen Univ, Dept Mech & Electromech Engn, Kaohsiung 804, Taiwan

[2] Natl Sun Yat Sen Univ, Adv Crystal Opto Elect Res Ctr, Kaohsiung 804, Taiwan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2008年 / 143卷 / 01期

关键词：

inclinometer; metal pendulum; liquid metal; SDS; damping effect;

D O I：

10.1016/j.sna.2007.08.021

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a high-performance impedance-type inclinometer fabricated in a glass-SU-8-glass sandwich structure for wide-angle measurements with rapid sensing response. The output signal of the proposed-inclinometer is read from a moving-metal pendulum based on the electrical potential measurement scheme. Two types of pendulum mass made by Ga-In-Sn alloy and mercury are used for the inclinometer. The friction between the liquid metal and substrate surfaces is dramatically reduced by applying an organic-based surfactant of SDS. Experimental results show the developed inclinometer has a wide linear range (320 degrees) and a high angle resolution (0.3 degrees). Performance test shows no time lag for the sensor output under a rotation speed of 1/8 rps, and no damping effect for an instant stop from a rotation speed of 45 degrees/s. The developed inclinometer provides a simple yet high-performance solution for tile angle measurement. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：113 / 119

页数：7

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