High-speed optical beam alignment based on a motion control technique for three-dimensional microelectromechanical systems optical switch modules

被引：0

作者：

Mizukami, Masato ^{[1
]}

Yamaguchi, Joji ^{[1
]}

Nemoto, Naru ^{[1
]}

机构：

[1] NTT Corp, Microsyst Integrat Labs, Atsugi, Kanagawa 2430198, Japan

来源：

OPTICAL ENGINEERING | 2011年 / 50卷 / 07期

关键词：

optical devices; optical communications; microelectromechanical systems; alignment;

D O I：

10.1117/1.3594787

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

For optical axis alignment when light deflection control of a MEMS mirror is done at high speed, we propose a method based on identifying the quadratic surface shape. The method uses information about the optical power monitored when the mirror is inclined to a small angle. It is shown that the search for maximum optical power is possible by using this method. We also designed a control system with a band-stop filter for resonance frequency to decrease residual vibration generated when the mirror is moved at high speed. We confirm that the searchable level of optical power can be improved. (C) 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.3594787]

引用

页数：4