3.4 GHz composite thin film bulk acoustic wave resonator for miniaturized atomic clocks

被引：4
作者：
Artieda, Alvaro [1 ]
Muralt, Paul [1 ]
机构：
[1] Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland
来源：
APPLIED PHYSICS LETTERS | 2011年 / 98卷 / 26期
基金：
瑞士国家科学基金会;
关键词：
FREQUENCY; SHIFTS;
D O I：
10.1063/1.3603944
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Triple layer SiO2/AlN/SiO2 composite thin film bulk acoustic wave resonators (TFBARs) were studied for applications in atomic clocks. The TFBAR's were tuned to 3.4 GHz, corresponding to half the hyperfine splitting of the ground state of rubidium Rb-87 atoms. The quality factor (Q) was equal to 2300 and the temperature coefficient of the resonance frequency f(r) amounted to 1.5 ppm/K. A figure of merit Qf(r) of similar to 0.8 x 10(13) Hz and a thickness mode coupling factor of 1% were reached. Such figures are ideal for frequency sources in an oscillator circuit that tracks the optical signal in atomic clocks. (C) 2011 American Institute of Physics. [doi:10.1063/1.3603944]
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页数：3
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