Resonance characteristics of micro cantilever in liquid

被引：20
作者：
Hirai, Y
Mori, R
Kikuta, H
Kato, N
Inoue, K
Tanaka, Y
机构：
[1] Univ Osaka Prefecture, Coll Engn, Dept Mech Syst Engn, Osaka 5998531, Japan
[2] Technol Res Inst Osaka Prefecture, Osaka 5941157, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1998年 / 37卷 / 12B期
关键词：
micro cantilever; frequency response; resonance; viscous fluid; drag force; optical lever; liquid;
D O I：
10.1143/JJAP.37.7064
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The resonance characteristics of a micro cantilever are experimentally and theoretically studied. The micro cantilever is vibrated by thermal excitation using laser exposure and the frequency responses of the micro cantilever in air, acetone and water are experimentally evaluated based on an optical measurement technique. It is demonstrated that the resonance frequencies in water decrease to about one-tenth of the values in air. Also. the frequency responses are calculated using the string of beads model taking into consideration the drag force by viscous fluids. The calculation results show good agreement with the experimental results.
引用
收藏
页码：7064 / 7069
页数：6
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