External control of dissipation in a nanometer-scale radiofrequency mechanical resonator

被引：125
作者：
Cleland, AN [1 ]
Roukes, ML [1 ]
机构：
[1] CALTECH, Pasadena, CA 91125 USA
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 72卷 / 03期
关键词：
dissipation; nanometer; micromachining; radiofrequency; resonator;
D O I：
10.1016/S0924-4247(98)00222-2
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We demonstrate a technique by which the quality factor of a magnetically-actuate mechanical resonator is controlled by an external electrical circuit. Modulation of this parameter is achieved by local variation of the electrical impedance presented to the resonator at its resonance frequency. We describe a theory that explains this result as arising from eddy currents in the external electrical circuit, which are driven by electromotive forces generated through motion of the resonator in the applied magnetic field. The theory is in good agreement with the induced variation in quality factor that we observe. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：256 / 261
页数：6
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