Pulsed laser deposition of thin films

被引：0
|
作者：
Jelinek, M
Trtik, V
Jastrabik, L
机构：
来源：
PHYSICS AND MATERIALS SCIENCE OF HIGH TEMPERATURE SUPERCONDUCTORS, IV | 1997年 / 26卷
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The principle of thin film deposition by laser ablation, a droplet problem, basic schemes for laser deposition of smooth thin films, creation of multilayer structures with YBaCuO, ferroelectric films and metals are discussed. Experimental results with deposition of YBaCuO on monocrystalline and polycrystalline substrates, buffer layers, ferroelectric films (PZT, PLZT, PMN) and some possible applications are presented.
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页码：215 / 231
页数：3
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