Packaging of nanostructured microelectromechanical systems microtriode devices

被引：3

作者：

Chen, LH ^{[1
]}

Jin, S ^{[1
]}

机构：

[1] Univ Calif San Diego, La Jolla, CA 92093 USA

来源：

JOURNAL OF ELECTRONIC MATERIALS | 2003年 / 32卷 / 12期

关键词：

microelectromechanical systems (MEMS); carbon nanotube; packaging; microwave amplifier;

D O I：

10.1007/s11664-003-0101-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Combining the world of microelectromechanical systems (MEMS) with that of nano can lead to new devices with unique or advanced functionalities. Carbon nanotubes are fascinating new nanomaterials with many interesting physical, chemical, and electronic properties and potential new applications. We have incorporated nanotubes into the MEMS structure as patterned, cold-cathode field emitters to create on-chip, miniature vacuum tubes of microtriodes that can be useful for high-frequency microwave communications. Proper bonding and assembly processes were essential in providing reliable electrical connections and improved amplification performances.

引用

页码：1360 / 1365

页数：6

共 19 条

[1] Nucleation and growth of carbon nanotubes by microwave plasma chemical vapor deposition [J].