Ferroelectric properties and leakage current mechanisms of Bi3.25La0.75Ti3O12 thin films with a-axis preferred orientation prepared by sol-gel method

被引:25
作者
Kao, M. C. [1 ]
Chen, H. Z. [1 ]
Young, S. L. [1 ]
机构
[1] Hsiuping Inst Technol, Dept Elect Engn, Taichung 412, Taiwan
关键词
bismuth titanate; sol-gel; thin film; rapid thermal processing; ferroelectric; leakage current mechanism;
D O I
10.1016/j.matlet.2007.06.023
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The Bi3.25La0.75Ti3O12 (BLT) thin films were prepared on the Pt/Ti/SiO2/Si substrates using the sol-gel process and crystallized subsequently using the conventional (CTA) and rapid thermal annealing (RTA) processes. It was found that the crystalline, structure, ferroelectric and leakage current properties of BLT films strongly depend upon the heating rate of the sol-gel method. BLT thin films crystallized by the RTA method showed a-axis preferred orientation with smaller grain size comparable with those of films crystallized by the CTA process. The values of remanent polarization (2P(r)) and the coercive field (2E(c)) of film crystallized by the RTA process were 49 mu/cm(2) and 105 kV/cm, respectively. This 2P(r) value was larger than that of CTA-derived film (2P(r) and 2E(c) values were 36 mu C/cm(2) and 125 kV/cm, respectively). The RTA-derived film had a lower leakage current (4.85 x 10(-8) A/cm(2)) than the latter (6.5 x 10(-8) A/cm(2)) at 200 kV/cm, and both films demonstrated fatigue-free behavior up to 10(8) switching cycles. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:629 / 632
页数:4
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