Piezoelectric thick film ultrasonic transducers fabricated by a spray technique

被引:0
作者
Kobayashi, M [1 ]
Olding, TR [1 ]
Zou, L [1 ]
Sayer, M [1 ]
Jen, CK [1 ]
Rehman, AU [1 ]
机构
[1] McGill Univ, Dept ECE, Montreal, PQ H3A 2A7, Canada
来源
2000 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 | 2000年
关键词
D O I
暂无
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
Thick film broadband ultrasonic transducers (UTs) produced using sol-gel spray technique, operating below 10 MHz are presented. These UTs are formed by dispersing PZT and LiTaO3 particles, respectively in Al2O3 and PZT sol-gel solution. The 50-100 mum thick films have been deposited on curved steel, flat steel and aluminum substrates and steel rods. Ultrasonic pulse-echo signals with a signal to noise ratio of more than 25 dB are experimentally obtained for the operating temperatures up to 250 degreesC.
引用
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页码:985 / 989
页数:3
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