The Effect of the Annealing on the Properties of ZnO/Cu/ZnO Multilayer Structures

被引：7

作者：

Rasheed, Hiba S. ^{[1
,2
]}

Ahmed, Naser M. ^{[1
]}

Matjafri, M. Z. ^{[1
]}

Sabah, Fayroz A. ^{[1
,3
]}

Al-Rawi, Hamzah N. ^{[4
]}

机构：

[1] Univ Sains Malaysia, Sch Phys, Nanooptoelect Res & Technol Lab, George Town 11800, Malaysia

[2] Al Mustansiriya Univ, Coll Educ, Dept Phys, Baghdad, Iraq

[3] Al Mustansiriya Univ, Coll Engn, Dept Elect Engn, Baghdad, Iraq

[4] Univ Sains Malaysia, Sch Elect & Elect Engn, Nibong Tebal 14300, Penang, Malaysia

来源：

5TH INTERNATIONAL CONFERENCE ON RECENT ADVANCES IN MATERIALS, MINERALS AND ENVIRONMENT (RAMM) & 2ND INTERNATIONAL POSTGRADUATE CONFERENCE ON MATERIALS, MINERAL AND POLYMER (MAMIP) | 2016年 / 19卷

关键词：

RF sputtering; multilayer; Optical and Electrical properties; OPTICAL-PROPERTIES; FILMS; SILVER;

D O I：

10.1016/j.proche.2016.03.011

中图分类号：

X [环境科学、安全科学];

学科分类号：

08 ; 0830 ;

摘要：

Study of ZnO / Cu / ZnO multilayer film stack using Cu film as a sandwich layer, in order to improve the overall performance of the transparent conductive film, structural, electrical and optical properties. ZnO / Cu / ZnO multilayer films prepared at room temperature by a DC and RF magnetron sputtering technique. The results showed that ZnO / Cu / ZnO multilayer film has good crystalline properties. With an increasing Cu layer thickness, a visible light transmittance of the multilayer film is reduced, while the electrical performance improved significantly. In the Cu layer thickness of 20 nm, ZnO / Cu / ZnO multilayer film optoelectronic integrated for optimal performance (C) 2016 The Authors. Published by Elsevier B.V.

引用

页码：38 / 44

页数：7

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