Investigation of AlGaN/AlN/GaN heterostructures for magnetic sensor application from liquid helium temperature to 300 °C

被引:15
作者
Bouguen, L. [1 ,2 ]
Contreras, S. [1 ,2 ]
Jouault, B. [1 ,2 ]
Konczewicz, L. [1 ,2 ]
Camassel, J. [1 ,2 ]
Cordier, Y. [3 ]
Azize, M. [3 ]
Chenot, S. [3 ]
Baron, N. [4 ]
机构
[1] Univ Montpellier 2, Etud Semicond Grp, F-34095 Montpellier 05, France
[2] CNRS, UMR 5650, F-34095 Montpellier, France
[3] CRHEA, CNRS, F-06560 Valbonne, France
[4] Picogiga Int, F-91971 Courtaboeuf, France
关键词
D O I
10.1063/1.2838301
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report a comparative investigation of the magnetic response of long channel AlGaN/AlN/GaN heterostructures (Hall-field effect transistor devices) grown on three different semi-insulating templates on silicon and sapphire. From Hall effect measurements conducted up to 573 K (300 degrees C), we find that some of these specific devices can be used as magnetic sensors in a large temperature range (similar to 600 degrees C) with a magnetic sensitivity close to 60 V/A T and a small thermal drift. On the best sample, between liquid helium temperature and 300 degrees C, the average value of the thermal drift is only -7 ppm/degrees C. (C) 2008 American Institute of Physics.
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页数:3
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