Behavior of Sputtered Indium-Tin-Oxide Thin Film on Poly-Ethylene Terephthalate Substrate Under Stretching

被引:28
作者
Hamasha, Mohammad M. [1 ,2 ]
Alzoubi, Khalid [3 ]
Lu, Susan [1 ,2 ]
机构
[1] SUNY Binghamton, Dept Syst Sci & Ind Engn, Binghamton, NY 13902 USA
[2] SUNY Binghamton, Res Ctr Autonomous Solar Power CASP, Binghamton, NY 13902 USA
[3] SUNY Binghamton, CASP, Binghamton, NY 13902 USA
来源
JOURNAL OF DISPLAY TECHNOLOGY | 2011年 / 7卷 / 08期
关键词
Flexible substrate; indium tin oxide (ITO); stretching test; COATINGS; FRAGMENTATION; POLYMERS;
D O I
10.1109/JDT.2011.2131634
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, two different sheet resistances, 100 and 60 Omega per square of DC-Magnetron sputtered indium tin oxide (ITO) thin film on poly ethylene terephthalate (PET) substrate were stretched up to 15% of the original length under three different strain rates, 0.01, 0.1, and 1.0 min(-1). The cracks development during stretching was monitored using optical microscope. Two types of cracks were observed: in the first type, cracks initiated perpendicularly to the tensile load and propagated towards the edge of the sample, which was observed at 4% strain for both sheet resistances and different strain rates. In the second type, cracks initiated from the first type cracks and propagated perpendicularly to it towards the next original crack. The cracks intensity for both types of cracks was investigated. The intensity of both cracks type increases with the strain and sheet resistance. The electrical resistance was measured every 1% strain during stretching. The relative electrical resistance change (Delta R/R-0) was plotted against strain at different strain rates. It could be concluded that, the relative electrical resistance change under high strain rate is higher at the beginning of the stretching process, but after a certain strain, the relative electrical resistance change under the lower strain rate accelerated till the film becomes non-conductive while the relative electrical resistance change under high strain rate is in acceleration process until reaching non-conductive condition. Analysis of Variance (ANOVA) results showed that the strain and the sheet resistance are significant factors on the relative electrical resistance change at 95% confidence level. The strain rate was not significant factor in the range considered. No two factor interactions are significant as well.
引用
收藏
页码:426 / 433
页数:8
相关论文
共 20 条
[1]  
ALZOUBI K, 2009, P ASME 2009 INTERPAC
[2]   Factor Effect Study for the High Cyclic Bending Fatigue of Thin Films on PET Substrate for Flexible Displays Applications [J].
Alzoubi, Khalid ;
Lu, Susan ;
Sammakia, Bahgat ;
Poliks, Mark .
JOURNAL OF DISPLAY TECHNOLOGY, 2011, 7 (06) :348-355
[3]   Analysis of the initial fragmentation stage of oxide coatings on polymer substrates under biaxial tension [J].
Andersons, J ;
Leterrier, Y ;
Fescenko, I .
THIN SOLID FILMS, 2003, 434 (1-2) :203-215
[4]   Electromechanical properties of transparent conducting substrates for flexible electronic displays [J].
Cairns, DR ;
Crawford, GP .
PROCEEDINGS OF THE IEEE, 2005, 93 (08) :1451-1458
[5]   Polymers for flexible displays: From material selection to device applications [J].
Choi, Myeon-Cheon ;
Kim, Youngkyoo ;
Ha, Chang-Sik .
PROGRESS IN POLYMER SCIENCE, 2008, 33 (06) :581-630
[6]   TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].
CHOPRA, KL ;
MAJOR, S ;
PANDYA, DK .
THIN SOLID FILMS, 1983, 102 (01) :1-46
[7]  
Crawford GP, 2005, WILEY-SID SER DISPL, P1, DOI 10.1002/0470870508
[8]   EFFECT OF O2 PRESSURE DURING DEPOSITION ON PROPERTIES OF RF-SPUTTERED SN-DOPED IN2O3 FILMS [J].
FAN, JCC ;
BACHNER, FJ ;
FOLEY, GH .
APPLIED PHYSICS LETTERS, 1977, 31 (11) :773-775
[9]   Electrically insulating Al2O3 and SiO2 films for sensor and photovoltaic applications deposited by reactive pulse magnetron sputtering, hollow cathode arc activated deposition and magnetron-PECVD [J].
Frach, P. ;
Bartzsch, H. ;
Gloess, D. ;
Fahland, M. ;
Haendel, F. .
SURFACE & COATINGS TECHNOLOGY, 2008, 202 (22-23) :5680-5683
[10]   Plastic substrate with gas barrier layer and transparent conductive oxide thin film for flexible displays [J].
Hanada, Toru ;
Negishi, Tuyoto ;
Shiroishi, Isao ;
Shiro, Takashi .
THIN SOLID FILMS, 2010, 518 (11) :3089-3092