Piezoresistance effect in p-type silicon

被引:0
作者
Kanda, Y [1 ]
Matsuda, K [1 ]
机构
[1] Kojundo Chem Lab Co Ltd, Sakado, Saitama 3500284, Japan
来源
Physics of Semiconductors, Pts A and B | 2005年 / 772卷
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D O I
暂无
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Difference between unstrained heavy and light hole effective masses in the direction of applied strain obtained by D-K-K formula has correlated with the longitudinal piezoresistance (PR) coefficient but not with the transverse PR. Graphical representation of the longitudinal PR coefficients calculated by macroscopic fourth rank PR tensor has proved the fact.
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页码:79 / 80
页数:2
相关论文
共 14 条
[1]   CYCLOTRON RESONANCE OF ELECTRONS AND HOLES IN SILICON AND GERMANIUM CRYSTALS [J].
DRESSELHAUS, G ;
KIP, AF ;
KITTEL, C .
PHYSICAL REVIEW, 1955, 98 (02) :368-384
[2]   THEORY OF CYCLOTRON RESONANCE IN STRAINED SILICON CRYSTALS [J].
HASEGAWA, H .
PHYSICAL REVIEW, 1963, 129 (03) :1029-&
[3]   CYCLOTRON RESONANCE EXPERIMENTS IN UNIAXIALLY STRESSED SILICON - VALENCE BAND INVERSE MASS PARAMETERS AND DEFORMATION POTENTIALS [J].
HENSEL, JC ;
FEHER, G .
PHYSICAL REVIEW, 1963, 129 (03) :1041-&
[4]   TRANSPORT AND DEFORMATION-POTENTIAL THEORY FOR MANY-VALLEY SEMICONDUCTORS WITH ANISOTROPIC SCATTERING [J].
HERRING, C ;
VOGT, E .
PHYSICAL REVIEW, 1956, 101 (03) :944-961
[5]   ORIGIN OF THE SHEAR PIEZORESISTANCE COEFFICIENT-PI-44 OF N-TYPE SILICON [J].
KANDA, Y ;
SUZUKI, K .
PHYSICAL REVIEW B, 1991, 43 (08) :6754-6756
[6]   PIEZORESISTANCE EFFECT OF SILICON [J].
KANDA, Y .
SENSORS AND ACTUATORS A-PHYSICAL, 1991, 28 (02) :83-91
[8]   Stress-dependent hole effective masses and piezoresistive properties of p-type monocrystalline and polycrystalline silicon [J].
Kleimann, P ;
Semmache, B ;
Le Berre, M ;
Barbier, D .
PHYSICAL REVIEW B, 1998, 57 (15) :8966-8971
[9]  
MATSUDA K, 1993, J APPL PHYS, V73, P1837
[10]  
OHMURA Y, 1990, PHYS REV B, V42, P83