In-situ formed nanoparticles on 3C-SiC film under femtosecond pulsed laser irradiation

被引:9
作者
Dong, YY [1 ]
Molian, P [1 ]
机构
[1] Iowa State Univ Sci & Technol, Dept Engn Mech, Ames, IA 50011 USA
来源
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2005年 / 202卷 / 06期
关键词
D O I
10.1002/pssa.200420015
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Nanoparticles in-situ formed on single crystalline SiC films under femtosecond pulsed laser irradiation were characterized by SEM, AM AES, and Raman scattering. The size, shape, composition and internal stress of nanoparticles were investigated with respect to energy fluences. Femtosecond laser induced Coulomb explosion is most likely responsible for synthesis of highly oriented nanoparticles within a certain range of energy fluences. (c) 2005 WILEY-VCH Verlag GmbH & Co. KGaA. Weinheim.
引用
收藏
页码:1066 / 1072
页数:7
相关论文
共 27 条
[1]   Perspectives on the physical chemistry of semiconductor nanocrystals [J].
Alivisatos, AP .
JOURNAL OF PHYSICAL CHEMISTRY, 1996, 100 (31) :13226-13239
[2]   Colloidal quantum dots. From scaling laws to biological applications [J].
Alivisatos, P .
PURE AND APPLIED CHEMISTRY, 2000, 72 (1-2) :3-9
[3]  
Böhme O, 2001, ADV MATER, V13, P597
[4]   Femtosecond pulsed laser ablation of 3C-SiC thin film on silicon [J].
Dong, Y ;
Molian, P .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2003, 77 (06) :839-846
[5]   Coulomb explosion-induced formation of highly oriented nanoparticles on thin films of 3C-SiC by the femtosecond pulsed laser [J].
Dong, YY ;
Molian, P .
APPLIED PHYSICS LETTERS, 2004, 84 (01) :10-12
[6]   Femtosecond pulsed laser micromachining of single crystalline 3C-SiC structures based on a laser-induced defect-activation process [J].
Dong, YY ;
Zorman, C ;
Molian, P .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (05) :680-685
[7]   Formation of ordered nanoscale semiconductor dots by ion sputtering [J].
Facsko, S ;
Dekorsy, T ;
Koerdt, C ;
Trappe, C ;
Kurz, H ;
Vogt, A ;
Hartnagel, HL .
SCIENCE, 1999, 285 (5433) :1551-1553
[8]   NANOSTRUCTURED MATERIALS [J].
GLEITER, H .
ADVANCED MATERIALS, 1992, 4 (7-8) :474-481
[9]   Laser ablation and micromachining with ultrashort laser pulses [J].
Liu, X ;
Du, D ;
Mourou, G .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1997, 33 (10) :1706-1716
[10]  
Liu X., 2001, MAT PHYS MECH, V4, P85