Measurement of wavefront curvature using computer-generated Fourier holograms

被引：0
|
作者：
Krasin, George [1 ]
Kovalev, Michael [1 ]
Odinokov, Sergey [1 ]
Stsepuro, Nikita [1 ]
Glukhov, Yuriy [2 ]
机构：
[1] Bauman Moscow State Tech Univ, Laser & Opt Elect Dept, Ul Baumanskaya 2 Ya,5, Moscow 105005, Russia
[2] ELTA Ltd, Ul Konstruktora Guskova 3,Bldg 4, Zelenograd 124460, Russia
来源：
OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION XI | 2019年 / 11056卷
关键词：
computer generated holography; laser beam control; wavefront measurement; hologram filters; Fourier hologram; adaptive optics; SENSOR;
D O I：
10.1117/12.2525719
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Laser radiation for a high precision measurement such as nanostructure measurement needed to be clean of wavefront aberrations. However, only expensive lasers with stabilization can achieve such robust parameters. The emission is needed to be corrected via adaptive optics. Nevertheless, high precision measurement of wavefront aberrations is necessary to high precision correction. The present work is dedicated to the problem of computer-generated Fourier holograms application for measurement of optical wavefront curvature with high precision. Mathematical modeling and experimental results of the method with the comparison of different approaches are presented.
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页数：7
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