Infrared wavelength selective micromachined microbolometers

被引：4

作者：

Kim, JW ^{[1
]}

Neikirk, DP ^{[1
]}

机构：

[1] Univ Texas, Dept Elect & Comp Engn, Microelect Res Ctr, Austin, TX 78712 USA

来源：

SMART SENSORS, ACTUATORS, AND MEMS, PTS 1 AND 2 | 2003年 / 5116卷

关键词：

microbolometer; tunable Fabry-Perot cavity; uncooled device; blackbody spectrum; infrared; wavelength selectivity;

D O I：

10.1117/12.499017

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

Numerical simulation of the affect of a micromachined tunable Fabry-Perot cavity on the performance of microbolometer is conducted. In particular, the ability of such a tuning structure to allow the determination of effective temperature of an object is studied. Assuming incoming infrared radiation from a blackbody source has a certain distribution of wavelengths for a specific temperature, and scanning over different Fabry-Perot gaps while using a total power detector such as a microbolometer, it is possible to predict the original blackbody spectrum. Comparing the original blackbody spectrum with the predicted spectrum, the optimum interval over which the gaps must be scanned can be determined.

引用

页码：514 / 522

页数：9