Studying on Preparation of AZO thin films with Sol-gel method

被引：3
|
作者：
Lv, Xiuling [1 ]
Dou, Yubo [1 ]
Wang, Juan [1 ]
Xu, Ying [1 ]
机构：
[1] Hebei Polytech Univ, Postgrad Sch, Tangshan 063009, Heibei, Peoples R China
来源：
NEW MATERIALS AND ADVANCED MATERIALS, PTS 1 AND 2 | 2011年 / 152-153卷
关键词：
sol-gel; AZO thin film; doping mechanism;
D O I：
10.4028/www.scientific.net/AMR.152-153.868
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Al doped ZnO thin films ( AZO films) was prepared by sol-gel method. The influence of Parameters of different processes on the crystallization properties, micro-morphology and optical properties of this kind of films were studied, using by X-ray diffractometer, filed emission stereoscan, spectral photometer, hall admeasuring apparatus. The results indicated that the crystallization properties, micro-morphology and optical properties of Al doped ZnO films were best on the condition that the sol density was 0.5mol/L, hat treatment temperature is 600 degrees C and there is a 8-layer coating.
引用
收藏
页码：868 / 873
页数：6
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