Electric charge 3-dimensional profile measurement in dielectrics using acoustic microscope probe head

被引:1
|
作者
Qin, XK [1 ]
Suzuki, K [1 ]
Sazaki, M [1 ]
Tanaka, Y [1 ]
Takada, T [1 ]
机构
[1] Tongji Univ, Pohl Inst Solid State Phys, Shanghai 200092, Peoples R China
关键词
D O I
10.1109/ICSD.1998.709216
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:13 / 16
页数:4
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