Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes

被引：75

作者：

Malshe, A. P. ^{[1
]}

Rajurkar, K. P. ^{[2
]}

Virwani, K. R. ^{[3
]}

Taylor, C. R. ^{[4
]}

Bourell, D. L. ^{[5
]}

Levy, G. ^{[6
]}

Sundaram, M. M. ^{[7
]}

McGeough, J. A. ^{[8
]}

Kalyanasundaram, V. ^{[1
]}

Samant, A. N. ^{[1
]}

机构：

[1] Univ Arkansas, Fayetteville, AR 72701 USA

[2] Univ Nebraska, Lincoln, NE USA

[3] IBM Almaden Res Ctr, San Jose, CA USA

[4] Univ Florida, Gainesville, FL USA

[5] Univ Texas Austin, Austin, TX 78712 USA

[6] InspireAG, St Gallen, Switzerland

[7] Univ Cincinnati, Cincinnati, OH USA

[8] Univ Edinburgh, Edinburgh, Midlothian, Scotland

来源：

CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2010年 / 59卷 / 02期

关键词：

Manufacturing; Nano manufacturing; Tip-based nano manufacturing; DIP-PEN-NANOLITHOGRAPHY; SCANNING TUNNELING MICROSCOPE; HIGH-ASPECT-RATIO; FOCUSED-ION-BEAM; SURFACE MODIFICATION; FORCE MICROSCOPY; THIN-FILM; DIAMOND TIPS; NANOSCALE DEPOSITION; FIELD-EMISSION;

D O I：

10.1016/j.cirp.2010.05.006

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nanomanufactured products with higher complexities in function, materials, scales and their integration demand an increasing need for advanced manufacturing tools. Iris driven by applications such as ultra-dense memory, individualized biomedicine and drug delivery, molecular reading and sorting, and nanoscale circuitry. The tip-based nanomanufacturing (TBN) platform represents a potent gamut of processes for such applications - performing various nanoscale manufacturing operations including machining, depositing, patterning, and assembling with in situ metrology and visualization. This keynote paper presents a comprehensive overview of TBN processes based upon "nanotool tips" applying electrical, electrochemical, mechanical, electromagnetic and other forces to perform manufacturing operations. (C) 2010 CIRP.

引用

页码：628 / 651

页数：24

共 234 条

[1] SURFACE MODIFICATION WITH THE SCANNING TUNNELING MICROSCOPE [J].