Plasma distributions observed in a 2.45 GHz hydrogen discharge

被引：15
作者：
Cortazar, O. D. [1 ]
Megia-Macias, A. [2 ]
Tarvainen, O. [3 ]
Vizcaino-de-Julian, A. [2 ]
Koivisto, H. [3 ]
机构：
[1] Univ Castilla La Mancha, ETSII, Dept Appl Mech INEI, E-13071 Ciudad Real, Spain
[2] ESS Bilbao Consortium, Zamudio 48170, Vizcaya, Spain
[3] Univ Jyvaskyla, Dept Phys, Jyvaskyla 40500, Finland
来源：
PLASMA SOURCES SCIENCE & TECHNOLOGY | 2014年 / 23卷 / 06期
关键词：
ECR; plasma source; ultra-fast pictures;
D O I：
10.1088/0963-0252/23/6/065028
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
The existence of various spatial distributions of hydrogen plasma in a pulsed 2.45 GHz microwave discharge is demonstrated. The data has been obtained through optical emission diagnostics utilizing an ultra-fast CCD camera system with multi-channel plate (MCP) intensifiers, and a wavelength-filtered photodiode recording temporal light emission signals of hydrogen atoms and molecules. It has been observed that the magnetic field topology and strength are determining the transitions between different plasma patterns and spectral saturation times while neutral gas pressure and microwave power show a weaker influence on the profiles but affect the emitted light intensity.
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页数：12
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