Different substrate materials effect on structure of ta-C films by Raman spectroscopy for magnetic recording sliders

被引：12
作者：
Liu, Fan-Xin [1 ]
Yao, Kai-Lun
Liu, Zu-Li
机构：
[1] Huazhong Univ Sci & Technol, Dept Phys, Wuhan 430074, Peoples R China
[2] Chinese Acad Sci, Int Ctr Mat Phys, Shenyang 110016, Peoples R China
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 2007年 / 353卷 / 26期
基金：
中国国家自然科学基金;
关键词：
D O I：
10.1016/j.jnoncrysol.2007.04.026
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Raman spectra, using visible (514 nm) and ultraviolet (244 nm) excitation, of tetrahedral amorphous carbon (ta-C) films of thickness of 5 nm have been studied as a function of different substrates materials. These materials are Fe-Co (Fe: 67 at.%, Co: 33 at.%) alloy, Fe-Ni alloy (Fe: 18 at.%, Ni: 82 at.%), An and Al2O3 TiC (Al2O3: 64 at.%, TiC: 36 at.%), which are mainly used in magnetic recording sliders. The spectra show that the films deposited on Al2O3-TiC contain the highest sp(3) content, with a lower sp(3) content observed in films deposited to Fe-Co and Fe-Ni alloys. The lowest sp(3) content was observed in films on the An substrate. The results also indicate that the anti-wear performance of ta-C film on different substrates varies as Al2O3-TiC (the best) > Fe-Co and Fe-Ni alloy > Au (the worst). Also mechanisms are proposed to explain the effect of substrate material on these thin film properties. (C) 2007 Elsevier B.V. All rights reserved.
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收藏
页码：2545 / 2549
页数：5
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